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TMC13 Deposition Rate Controller for Thin Film Applications
The TMC13 Deposition Rate Controller from Henniker Scientific is a versatile, multi-channel device that has been designed for repeatebale, reliable and accurate control of film thickness and rate in vacuum based thin film deposition processes.
control of film thickness and rate in vacuum based thin film deposition processes.
The feature-rich touch-screen interface can be easily customised to suit a particular operator preference and can be operated in both automatic and manual modes,
providing a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent deposition sources.
The device also includes shutter relays for each channel, two analogue inputs for connection of pressure gauges, and two re-transmission analogue outputs as standard, as well as an extensive and fully editable materials library.
Where control features are not required, the quartz crystal balance can be interfaced directly with a PC via the compact, low cost, single channel TM13 interface which
provides a highly stable and repeatable frequency to rate/thickness conversion for all industry standard 6MHz quartz crystals.