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Newport’s New, Integrated Vertical and Rotation Stage for Wafer Positioning
Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, announces a specialized Integrated Vertical and Rotation Stage, the ZVR.
Newport’s ZVR features a compact and rigid design with improved cantilevered load capacity. With significantly lower cross-talk than earlier designs, the new stage delivers higher dynamic system performance in a very low-profile footprint. The low mass, along with a high natural frequency, accommodates a variety of rapid step-and-settle positioning applications.
The ZVR vertical platform has a wide, 3-point base with a stepper-motor-
The highly-stable, three-point bottom interface permits mounting to any XY stage or other platform. A large, clear aperture through the center of the stage simplifies electrical cable and vacuum-chuck cable/hose management. For added convenience, all electrical and vacuum chuck utility connections are found at a single location.
Newport will be showcasing the ZVR integrated vertical and rotation stage at SEMICON West 2012 at Moscone Center (San Francisco, CA), July 10-12. For more information, please stop by Newport’s South Hall booth #1507 for a demonstration, or visit www.newport.com/