Follow on Google News News By Tag * Thin Film Metrology * Atomic Absorption * Film Growth Monitor * Flux Density Measurement * Deposition Rate * More Tags... Industry News News By Place Country(s) Industry News
Follow on Google News | k-Space Awarded SBIR Phase I Grant for Development of Atomic-Absorption Based Flux MonitorThe goal of the SBIR Phase I work will be the development of a multi-species, AAS-based film growth monitor that is robust and non-intrusive, with very low long-term drift, high material selectivity and sensitivity, fast response time, and wide operating pressure range capable of covering both ultra-high vacuum (UHV) and sputtering processes. With its high sensitivity and long-term accuracy under continuous operation, it should find immediate application in the fabrication of multilayer Laue lenses (MLLs), as well as many other thin-film products including lasers, photovoltaics, and LEDs, to name a few. k-Space Associates’ CEO Darry Barlett says, “We investigated several different potential technologies for this flux monitor, including tunable lasers and broadband white light sources. In the end, the Hollow Cathode Lamp (HCL) approach offers the most flexibility and cost effectiveness. Combining the HCL sources with new solid-state spectrometer technology, we’re confident that we can develop a very stable and high sensitivity flux monitor under this Phase I effort.” It is expected that the proposed instrument, when successfully developed, will become a standard tool for both the R&D and manufacturing of thin-film devices. About k-Space Associates, Inc.k-Space Associates, Inc. is a leading supplier of advanced instrumentation and software for the surface science and thin-film technology industries. Founded in 1992, its systems are used for monitoring wafer temperature, thin film stress, deposition rate, thickness, material absorptive properties, and Reflective High Energy Electron Diffraction (RHEED). Backed by a commitment to ongoing support, these solutions are currently used worldwide in research and production line monitoring of compound semiconductor- End
Account Email Address Account Phone Number Disclaimer Report Abuse
|
|