The ColdAb® Series 4system delivers industrial-scale PLD coating production of 4-inch wafer sizes, including the fully-automated delivery of substrates to the pre-clean chamber and to the main Coldab® coating chamber. The deposition chamber includes many of the unique features that have been developed by Picodeon, and uses the patented ColdAb® process which enables large-area thin-film coating deposition using a high frequency picosecond laser. This has not been possible before at this scale, as conventional PLD has lower growth rate compared to Picodeon's ColdAb® process. The benefits of the cold ablation process are a smooth and particle-free surface, and that the target material’s stoichiometry may be fully transferred to the thin-film on the substrate. This is an important issue for instance with oxides and composites.
“The new ColdAb® Series 4tool includes a 10 wafer Loadlock chamber. Instead of having many costly laser sources, ColdAb® Series4 is equipped with one 200W @ 40MHz laser source. This makes the system less expensive and easier to use. Picodeon has used earlier versions of this equipment for R&D for many years, and now it is time to ramp up that process technology to industrial scale with Series 4,” said Dr. Jari Liimatainen, the CEO of Picodeon Ltd Oy.
The system provides multi-layer deposition capability for a wide variety of materials including oxides, metals, and several composites, and also enables temperature-
The first ColdAb® Series4system will be available in January 2014. The trailer is available on http://www.youtube.com/
About Picodeon Ltd
Picodeon is a Finnish nanotechnology company specializing in thin film coatings and surface treatments with its patented Coldab® Ultra-Short Pulsed Laser Deposition (USPLD) process. Picodeon has extensive experience of delivering thin-film applications with wear-resistant, low-friction, biocompatible, thermal-conductivity and electrical-conductivity thin-film properties. Picodeon provides equipment, solutions and services for its clients worldwide. Picodeon is located in Ii, Finland and is financially backed by Enso Ventures. www.picodeon.com
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