Direct-drive technology provides faster rotating speeds with superior reliability and enhanced positioning sensitivity. By integrating the bearings with the motor, the stage’s footprint is only 115 mm x 115 mm. A precision glass scale encoder guarantees 0.0003 degrees repeatability and 0.0001 degree minimum incremental motion. The brushless DC torque motor with rare earth magnets optimizes the available torque to deliver extremely rapid point-to-point motions. Other features include 360-degree travel with 0.01° on-axis accuracy, a proprietary 4-point contact ball bearing design, and a 30-mm diameter through-hole for easy routing of cable and vacuum lines.
The robust RGV100HL is ideal for demanding applications requiring fast dynamic response and for tasks that require moving larger platens. It is perfectly suited for semiconductor wafer inspection and metrology, laser micromachining, micro-robotics, motion simulators, rate tables and simulators, sensor calibration, and MEMs production.
For more information about Newport’s new higher-torque, high-speed RGV100HL precision rotation stage, please visit: www.newport.com/