Newport’s New, Integrated Vertical and Rotation Stage for Wafer Positioning

PRLog (Press Release) - Jun. 15, 2012 - Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, announces a specialized Integrated Vertical and Rotation Stage, the ZVR.  Ideal for semiconductor wafer positioning, metrology, inspection, and repair, it is also useful in LED production and applications such as 3D scanning, digitizing models, and validation.

Newport’s ZVR features a compact and rigid design with improved cantilevered load capacity. With significantly lower cross-talk than earlier designs, the new stage delivers higher dynamic system performance in a very low-profile footprint.  The low mass, along with a high natural frequency, accommodates a variety of rapid step-and-settle positioning applications.  

The ZVR vertical platform has a wide, 3-point base with a stepper-motor-driven 10 mm Z-stage.  The integrated stainless steel rotation stage features smooth operation utilizing stainless steel ball bearings. It is available in two models, the ZVR-PP with a stepper motor or the ZVR-PC with a servo-driven DC motor.  Both rotation stages provide continuous 360-degree rotation for angular travel.  An optional linear encoder for the Z-stage or the Z-stage without the rotation stage, are also available.

The highly-stable, three-point bottom interface permits mounting to any XY stage or other platform.  A large, clear aperture through the center of the stage simplifies electrical cable and vacuum-chuck cable/hose management.  For added convenience, all electrical and vacuum chuck utility connections are found at a single location.

Newport will be showcasing the ZVR integrated vertical and rotation stage at SEMICON West 2012 at Moscone Center (San Francisco, CA), July 10-12.  For more information, please stop by Newport’s South Hall booth #1507 for a demonstration, or visit www.newport.com/ZVR.

Photo:
http://www.prlog.org/11901146/1