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Follow on Google News | CyberOptics Airborne Particle Sensor Honored at Semicon WestCyberOptics Airborne Particle Sensor Chosen As Finalist in Best of West 2011 Awards at Semicon West
By: CyberOptics Semiconductor About the Airborne Particle Sensor The latest addition to CyberOptics’ Positioned to reduce and/or replace handheld and bench-top particle counters that are limited in range by hand reach and cannot operate under actual wafer conditions nor measure the entire wafer path, the APS can identify particles under actual varying wafer conditions in tool and report data in real-time to validate and analyze particle contamination. Available in 200 mm and 300 mm form factors, the APS can go deep inside a tool without the need for partitioning required by monitor wafers to isolate the source of the particle contamination. For more information on the Airborne Particle Sensor, please refer to our web site at http://www.cyberopticssemi.com/ End
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