Micro Precision Automation (MPA), a supplier of precision automation for the semiconductor, telecom and biotech industries, will be presenting a 450mm metrology stage at SEMICON West, July 14, 15 and 16.
The polar coordinate stage consists of a linear, rotary and Z axis which results in an extremely compact footprint for inspecting 450mm wafers. The bridge configuration provides a stable platform for mounting a variety of metrology systems. Additional features include a built in prealigner, independent load-unload stations, a low contact vacuum chuck (1.7% of a 450 mm wafer) and an option for a lift pin mechanism for measuring wafer bow.
The stage will be shown at the Applied Mechatronics booth, North Hall 6082.
Micro Precision Automation
1015 Canal Blvd
Richmond, CA 94804-
www.microprecisionautomation.com
