Spicer will be presenting on the topic Thin-Layer Au-Sn Solder Bonding Process for Wafer-Level Packaging, Electrical Interconnects and MEMS Applications. The results being presented were obtained within a development program for a MEMS-based memory device. Wafer-to-wafer bonding is a key process in MEMS wafer-level packaging (WLP).
The developed MEMS wafer bonding process utilizes gold-tin solder electroplating and provides liquid-proof sealing and multiple reliable electrical connections between the bonded wafers. The wafer bond can withstand 300ºC and features a thin bond line (2-3 ?m), high bond strength, excellent bond gap control, and low stress due to small amount of bonding material.
Micralyne is one of the world’s largest, independent, MEMS development and MEMS manufacturing service providers. With its headquarters in Edmonton, Alberta, Canada, Micralyne services a diverse customer base with applications in, automotive sensors for control systems, lab-on-a-chip devices for drug discovery, MEMS optical switching and attenuation technology in telecommunication networks, optical light valves for computer-to-
# # #
Micralyne Inc. is one of the largest independent MEMS foundries. Micralyne offers MEMS product development and commercial MEMS manufacturing. Also, Micralyne is a leader in design and fabrication of microfluidic chips for life sciences.